Design of Dual Ended Tuning Fork Resonators for Roller Bearing Micro- Strain Measurement
نویسندگان
چکیده
The strain field within automotive roller bearings is intense but small in area (~150-250 um in length.) Dual Ended Tuning Fork (DEFT) resonators fabricated in a Silicon-on-Insulator process are examined as strain sensors for this application using Euler-Bernoulli beam theory. Frequencies of between 990 70and 780 40 kHz were found for .25% strained DEFT’s with strain sensitivities greater than 100 MHz. However, the limits of manufacturing suggest that these DEFT resonators may not be feasible for this application.
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